TriQuint半导体公司日前宣布了一项新的晶圆代工工艺,新工艺将使具有成本效益的毫米波应用成为可能。称为TQP15的150 mm砷化镓(GaAs)代工生产工艺专门针对Ka波段,有助于经济高效地开发毫米波(mmWave)MMIC支持各种应用,例如,VSAT、卫星通信和点对点无线电通信。TQP15已在美国俄勒冈州希尔伯勒TriQuint量产GaAs的晶圆厂投产。TQP15采用光刻技术,成本低于传统电子束工艺解决方案。同时,还采用难熔金 TriQuint Semiconductor has announced a new foundry process that will make cost-effective millimeter-wave applications possible. The 150-mm Gallium Arsenide (GaAs) foundry process, known as the TQP15, is specifically targeted at the Ka-band to help cost-effectively develop mmWave MMICs for applications such as VSAT, satellite communications and peer-to-peer radios. The TQP15 is in production at TriQuint’s GaAs-based wafer fab in Hillboro, Oregon. TQP15 lithography technology, the cost is lower than the traditional electron beam process solutions. At the same time, also used refractory gold