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铜合金中含有Pb、Sn、Zn、Ni等元素,其分布和相对含量对铜合金的性能具有重要影响。本工作采用飞行时间二次离子质谱(TOF-SIMS)法对铜合金标准样品GBW02137和GBW02140的表面进行了微区原位分析;采用束斑直径约5μm的一次离子束轰击500μm×500μm区域内的混合固体合金样品,实现了Cu、Pb、Ni、Sn和Zn元素的表面成像,并测量了各元素在铜合金样品表面的分布情况;利用标样校准法对GBW02137、GBW02140中的~(64)Zn/~(120)Sn、~(208)Pb/~(120)Sn值进行相对含量分析。实验结果表明:TOF-SIMS法可用于铜合金中Cu、Pb、Ni、Sn和Zn等元素的表面成像和相对含量测定;采用标样校准法进行相对含量分析时,测得的~(64)Zn/~(120)Sn相对误差小于5.1%,RSD优于2.5%,~(208)Pb/~(120)Sn的测量相对误差较大,接近27%,但其RSD仍低于5%。
Copper alloy contains Pb, Sn, Zn, Ni and other elements, the distribution and the relative content of the copper alloy has an important impact on the performance. In this work, the surface of copper alloy standard samples GBW02137 and GBW02140 were analyzed by TOF-SIMS in situ. The surface of 500μm × 500μm was bombarded with a primary ion beam with a beam spot diameter of about 5μm The surface of Cu, Pb, Ni, Sn and Zn elements were imaged and the distribution of each element on the surface of copper alloy was measured. The calibration curves of ~ (64) in GBW02137 and GBW02140 were measured by standard calibration method. Zn / ~ (120) Sn, ~ (208) Pb / ~ (120) Sn values. The experimental results show that the TOF-SIMS method can be used for the surface imaging and relative content determination of Cu, Pb, Ni, Sn, Zn and other elements in copper alloys. When the relative content of standard elements is calibrated, The relative error of Zn / ~ (120) Sn is less than 5.1% and the RSD is better than 2.5%. The relative error of ~ (208) Pb / ~ (120) Sn is relatively large, close to 27%, but its RSD is still below 5%.