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Computer Modeling of Inductively Coupled Plasmas: Plasma Chemistry and Feature Profile Simulations f
[会议论文] 作者：A. Bogaerts,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
In this talk,we will explain how to model etching and deposition processes for electronic device fabrication,as applied in Shallow Trench Isolation (STI) and th...
Computer Modeling of Inductively Coupled Plasmas Plasma Chemistry and Feature Profile Simulations fo
[会议论文] 作者：A. Bogaerts,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
In this talk,we will explain how to model etching and deposition processes for electronic device fabrication,as applied in Shallow Trench Isolation (STI) and th...
Plasma Species Interacting With Nickel Surfaces Towards An Atomic Scale Understanding Of Plasma-Cata
[会议论文] 作者：A. Bogaerts,E.C. Neyts,
来源：等离子体催化与能源材料应用研讨会(ISPCEM2012) 年份：2012
In order to improve the insight in plasma-catalysis,reactive molecular dynamics (MD) simulations of single and consecutive impacts of CHx (x={1,2,3}) plasma spe...
[会议论文] 作者：A. Bogaerts,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
A two-dimensional self-consistent fluid model coupled with the full set of Maxwell equations is established to investigate the phase shift effect on transient b...
[会议论文] 作者：A. Bogaerts,You-Nian Wang,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
A two-dimensional self-consistent fluid model coupled with the full set of Maxwell equations is established to investigate the phase shift effect on transient behaviors of electrodynamics and power de...
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