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  5. Fluid simulation of phase-shift effect in hydrogen capacitively coupled plasmas

Fluid simulation of phase-shift effect in hydrogen capacitively coupled plasmas

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：lpwxlwan
【摘 要】
：
A two-dimensional self-consistent fluid model coupled with the full set of Maxwell equations is established to investigate the phase shift effect on transient behaviors of electrodynamics and power de
【作 者】
：
Yu-Ru Zhang Xiang Xu A. Bogaerts You-Nian Wang 
【机 构】
：
School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian, China
【出 处】
：
2011年第三届微电子及等离子体技术国际会议
【发表日期】
：
2011年9期
【关键词】
：
Capacitively-coupled plasma Phase-shift effect Electromagnetic effects 
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A two-dimensional self-consistent fluid model coupled with the full set of Maxwell equations is established to investigate the phase shift effect on transient behaviors of electrodynamics and power deposition in a hydrogen capacitively-coupled plasma.
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