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A Study of the Surface Chemical Reaction on the Etched IGZO Thin Films by Using Inductively Coupled
[会议论文] 作者：Young-Hee Joo,Jong-Chang Woo,Chang-Il Kim, 来源：The 8th Asian-European International Conference on Plasma Su 年份：2011
...
A Surface Reaction of the Etched TiO2 Thin Films by Using a High Density Plasma
[会议论文] 作者：Jong-Chang Woo,Young-Hee Joo,Chang-Il Kim, 来源：The 8th Asian-European International Conference on Plasma Su 年份：2011
...
The Damage on the etched Surface of the ZnO Thin Films in the Cl-based gas chemistry
[会议论文] 作者：Keyong-Moo Heo,Jong-Chang Woo,Chang-Il Kim, 来源：第六届国际氧化锌及相关材料研讨会 年份：2010
...
Effect on the Etching Profile of Al2O3 Thin Film in BCl3C12-based Inductively Coupled Plasma
[会议论文] 作者：X.Yang,D.P.Kim,G.H.Kim,J.C.Woo,Chang-Il Kim, 来源：9th Asia-Pacific Conference on Plasma Science and Technology 年份：2008
...
A Study of the Surface Chemical Reaction on the Etched IGZO Thin Films by Using Inductively Coupled
[会议论文] 作者：Young-Hee Joo,Jong-Chang Woo,Chang-Il Kim, 来源：The 8th Asian-European International Conference on Plasma Su 年份：2011
...
Investigation of the Chemical Reaction on the Etched HfO2 Thin Film Surface by Using a High Density
[会议论文] 作者：Pil-Seung Kang,Jong-Chang Woo,Young-Hee Joo,Chang-Il Kim, 来源：The 8th Asian-European International Conference on Plasma Su 年份：2011
...
A Study of the Chemical Reaction on the Etched ITO Thin Films Surface Using Inductivity Coupled Plas
[会议论文] 作者：Hwan-Jun Kim,Jong-Chang Woo,Young-Hee Joo,Chang-Il Kim, 来源：The 8th Asian-European International Conference on Plasma Su 年份：2011
...
A Study of the Chemical Reaction on the Etched ITO Thin Films Surface Using Inductivity Coupled Plas
[会议论文] 作者：Hwan-Jun Kim,Jong-Chang Woo,Young-Hee Joo,Chang-Il Kim, 来源：The 8th Asian-European International Conference on Plasma Su 年份：2011
...
Investigation of the Chemical Reaction on the Etched HfO2 Thin Film Surface by Using a High Density
[会议论文] 作者：Pil-Seung Kang,Jong-Chang Woo,Young-Hee Joo,Chang-Il Kim, 来源：The 8th Asian-European International Conference on Plasma Su 年份：2011
...
Instability induced by air in amorphous Zn-Sn-O (ZTO) thin film transistor
[会议论文] 作者：Seung Han Kim,Yoon Soo Chun,Eugene Chong,Kyoung Chul Jo,Chang-Il Kim,Sang Yeol Lee, 来源：第六届国际氧化锌及相关材料研讨会 年份：2010
...
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