PE-CVD相关论文
A novel method for thin film coatings on capillary inner walls was introduced by atmospheric pressure DBD plasma.The adv......
为了揭示工作气体对DLC涂层的影响及为DLC在高温下的应用提供参考,通过通过控制工作气体中乙炔含量(C2H2/Ar流量比=100∶0、75∶25......
为了实现A公司“提高产能降低成本”的目标,本文通过实验试图发现一种大规模生产中可以在沉积Si3N4薄膜工艺上取代HDP-CVD(High De......
Plasma Enhanced-Chemical Vapour Deposition of Scuff-Resistant Hydrogenated Amorphous Carbon Coatings
Hydrogenated amorphous carbon coatings, deposited by low pressure plasma to minimize the wear of C100 steel components, ......
