Supermagnetron相关论文
By generating closed-loop electron E × B drift over the front and back surface of a band magnetron cathode, a unifo......
Hydrogenated amorphous carbon nitride (a-CNx:H) films were formed on p-Si, Al films deposited on n-Si (Al/n-Si) and glas......
Hydrogenated amorphous carbon nitride (a-CNx:H) films were formed on p-Si wafers set on a lower elec-trode by pulsed sup......