Focused Ion Beam Processing of Polymers:Pushing the Limits by Alternative Process Strategies

来源 :The 6th International Conference on Nanoscience and Technolo | 被引量 : 0次 | 上传用户：kyleSun81

【摘要】

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【作者】

：

H.Plank R.Winkler R.Schmied A.Orthacker J.Kraxner B.Chernev C.Mayrhofer J.E.Fr(o)ch J.Hobisch G.Trimmel

【机构】

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Institute for Electron Microscopy and Nanoanalysis,Graz University of Technology,8010 Graz,AUSTRIA;C

【出处】

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The 6th International Conference on Nanoscience and Technolo

【发表日期】

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2015年5期

【关键词】

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focused ion beam processing 3D nano-fabrication patterning polymers finite eleme

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　　During the last decade focused ion beam(FIB)processing has become an essential tool for sub-surface(3D)metrology and the site specific fabrication of ultrathin lamellas suitable for transmission electron microscopy.Beside these inspection and preparation related applications,FIB processing also attracted enormous attention as rapid-prototyping tool with respect surface modification and 3D structuring down to the lower nanometer scale.

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Focused Ion Beam Processing of Polymers:Pushing the Limits by Alternative Process Strategies

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