【摘 要】
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High quality films can be deposited by quarter torus cathodic arc deposition filter which is a double sword because it can produce high ionization rate plasma as well as the disadvantage of low produc
【机 构】
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Department of 702, School of Mechanical Engineering and Automation, Beihang University
【出 处】
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第十一届全国表面工程大会暨第八届全国青年表面工程学术会议
论文部分内容阅读
High quality films can be deposited by quarter torus cathodic arc deposition filter which is a double sword because it can produce high ionization rate plasma as well as the disadvantage of low productivity and nonuniform[1,2]. Recently, for the arc deposition, long and narrow rectangular cathodic target is emerging and it can produce a ribbon-like arc plasma. The shortcomings of quarter torus cathodic arc deposition filter could be overcome by filtering the Marcparticls from a Ribbon-like arc plasma. In this paper, the Ribbon-like Cathodic Arc Plasma (RCAP) in a magnetic field singularity area adjoins the cathode, which was created by combining a scanning magnetic field and a curved magnetic field, was novelly created. The Ribbon-like Cathodic Arc Plasma magnetic filter was invented and the instability due to the curved magnetic field was successfully prevented. The expansion of RCAP of C, Ti, Al has been researched under difference scanning magnetic field and curved magnetic field parameters. The creation, tran mission, distribution and controlling of RCAP as well as the ion charge distribution were studied. The effects of RCAP filter controlling parameters and the possibility of grouping ions according to their discharge were explored. The effects of the grouping Carbon ions on the formation of sp3 and sp2 bond in DLC films in a quantum view will also investigated to support the tailoring the structure and properties of Carbon films.
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