论文部分内容阅读
The synthesis of nc-Si/a-SiNx: H quantum dot thin films using RF/UHF high density PECVD plasmas
【机 构】
：
NU-SKKU Joint Institute for Plasma Nano Materials (IPNM), Center for Advanced Plasma Surface Technol
【出 处】
：
13th Asia-Pacific Conference on Plasma Science and Technolog
【发表日期】
：
2016年10期
其他文献
Numerical study on electron heating in RF glow discharge between parallel-plate electrodes at low pr
A 1D fluid model of the plasma generated by RF glow discharge between parallel-plate electrodes at low pressure is founded.The model is numerically solved by a finite difference method and the numeric
In recent years,large area discharge has attracted many attentions due to its potential applications in plasma biomedicine technology,plasma invisibility,plasma flow control.However,the generation and
Experimental studies on the characteristics of kilo-Hertz-driven argon discharge plasmas at a modera
Plasmas generated at a moderate pressure level (e.g.,0.1~10 Torr,or 1~100 Torr),which are also defined as mesoplasmas,possess the advantages of both low-pressure cold plasmas and atmospheric-pressure
Atmospheric Pressure Plasma Discharge and Surface Drilling Effect for Improving Low Temperature Dyei
The great energy consumption and pollution caused by the high temperature and pressure when dyeing PET fabrics with disperse dyes has caused great concern over the years,and poses many environmental p
In the process of plasma chemical vapor deposition of thin films,it is important to understand the effect of plasma discharging characteristics on morphology,structure and properties of the deposited
Dual frequency plasma source is widely used in industrial plasma process.[1,2]In the plasma,high frequency (HF) signal can increase ion density and low frequency (LF) signal can control ion energy.For
The effects of the nitriding layer including compound layer and nitride case produced by plasma nitriding processes with micro-pulsed unipolar power on the mechanical and corrosion resistance properti
Many studies have been investigated on high density plasma source (Electron Cyclotron Resonance[ECR],Inductively Coupled Plasma[ICP],Helicon plasma) for large area source after It is announced that pr
For engineering applications,diamond-like carbon films (DLC) are the most suitable coatings if high wear resistance and low friction are needed.One problem is their very poor adhesion on steel substra