The advent of integrated atomic force microscopes(AFMs)in stand-alone scanning electron microscopes(SEMs)opened new possibilities due to quantitative 3D information even on complex surface morphologies.This does not only reduce turnaround times but also expands the information for both techniques character in a comprehensive manner due to the quasi-simultaneous correlation within one setup.One example in material science is the investigation of slip steps structures and its correlation to the active dislocation sources after nanoindentation of metallic single crystals.