论文部分内容阅读
Influence of Bias Voltage on Microstructure and Properties of Al-containing Diamond-like Carbon Film
【机 构】
:
Division of Surface Engineering, Ningbo Institute of Materials Technology and Engineering, Chinese A
【出 处】
:
The 11th International Workshop on Plasma-Based Ion Implanta
【发表日期】
:
2011年3期
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