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提出了利用微小楔角剪切干涉仪测量同步辐射压弯准直镜姿态的方法。利用透镜和针孔产生与同步辐射发散度相同的激光束。通过剪切干涉仪,测量经压弯准直镜输出激光束的平行度,可将准直镜的位置、俯仰角度和镜面曲率皆调整到最佳。该剪切干涉仪结构简单,可根据条纹图样判断光束的平行度,每一幅干涉条纹图样与准直镜的一种姿态对应,因而这种方法能确定准直镜表面各点反射X射线的整体效果。该方法适用于测量波前曲率半径大竖直口径小的光束,不但精度高,而且具有实用价值。
A method to measure the attitude of synchrotron radiation bending collimator using a micro wedge angle interferometer was proposed. The use of lenses and pinholes produces a laser beam of the same divergence as the synchrotron radiation. The shearing interferometer measures the parallelism of the laser beam output through the press-bend collimator to optimize the position, pitch angle, and mirror curvature of the collimator. The shear interferometer has a simple structure and can determine the parallelism of light beams according to the fringe pattern. Each interference fringe pattern corresponds to a collimator attitude. Therefore, this method can determine the X-ray overall effect. This method is suitable for the measurement of small diameter of the beam with large radius of curvature of the wavefront, not only high precision, but also has practical value.