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采用大功率高重复频率准分子激光溅射热解石墨靶制备了类金刚石膜,研究了激光功率密度对膜的结构和性能的影响,分析了膜的紫外可见透过谱及膜的带隙结构、Raman谱和电子衍射图,结果表明随着激光功率密度由108W/cm2提高至1010W/cm2,膜的结构也由无定形非晶结构转变为纳米晶金刚石结构,膜中的sp3键舍量及各项性能均有提高.
Diamond-like carbon films were prepared by pyrolytic graphite target sputtering with high power and high repetition rate excimer laser. The effects of laser power density on the structure and properties of the films were studied. The UV-visible transmission spectrum and the band gap structure , Raman spectrum and electron diffraction pattern. The results show that the structure of the film also changes from amorphous to nanocrystalline diamond with the increase of laser power density from 108 W / cm2 to 1010 W / cm2. The number of sp3 bond in the film and The performance has improved.