提出了一种基于高频相移电子电路驱动的压电陶瓷执行器和外差式迈克尔逊激光干涉仪的纳米位置控制方法,该方法结合双轴机械传输导轨组成了高精度大量程纳米定位系统.系统实现步长为4.945 nm的直线位移,步长的相对不确定度为1.6×10-9,1μm行程误差重复性为0.1 nm,5 mm往返行程误差重复性为0.4 nm.该方法对纳米技术与计量界在纳米刻度上的操作控制都是很有用的. A new method of nano-position control based on high-frequency phase-shift electronic circuit driven piezoelectric actuator and heterodyne Michelson laser interferometer is proposed. The method combines with two-axis mechanical transmission rail to form a high-precision large-range nano-positioning system The linear step displacement of the system is 4.945 nm, the relative uncertainty of the step length is 1.6 × 10-9, the error of repeatability is 0.1 nm and the repeatability of 5 mm round trip error is 0.4 nm, Technology and metrology in the nano-scale operation and control are very useful.