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在当今飞速发展的超微科学技术领域里,毫米、微米的概念已经陈旧,到90年代一种新的超微概念例如毫微、微微、毫微微等,其对应的空间是10~(-9)米、10~(-12)米、10~(-15)米,对应的时间是毫微秒、微微秒、毫微微秒。科学家们研究发现,超微结构能以回异于宏观结构的方式工作,从而导致一门新学科的诞生,是科学技术上的一次革命。在超微科学技术中,微电子技术起着推动作用,
In today’s rapidly developing field of ultramicro-science and technology, the concept of millimeter-and-micrometer is already outdated. By the 1990s, a new concept of microregions such as nano, pico, femto and the like, corresponded to a space of 10-9 ) Meters, 10 ~ (-12) meters, 10 ~ (-15) meters, the corresponding time is nanoseconds, pico seconds, femto seconds. Scientists have found that the ultrastructure can work in a way that is different from the macrostructure, resulting in the birth of a new discipline and a revolution in science and technology. In the ultra-micro science and technology, microelectronics plays a catalytic role,