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此文简要叙述用于离子束材料改性装置的Ｆｒｅｅｍａｎ离子源的特性，其主要参数：灯丝电流、孤压、磁场、气流量和吸极电压与引出离子束流强的关系。对源体内部因微漏冷却水（真空度由３．９×１０－４降至４．２×１０－４Ｐａ）致使气体分子电离、起弧困难和等离子体不稳作了实验研究；对灯丝与弧室间的氮化硼绝绝物上沉积被溅射出的Ｗ、Ｍｏ原子导致绝缘下降、灯丝寿命缩短进行了部份结构改进。结果表明，提高加工工艺，确保真空系统密封性能和输入气体纯度对弧室内气体分子碰撞电离和等离子体的稳定至关重要；在ＢＮ绝缘物上放置钼制屏蔽罩有效地屏蔽掉Ｗ、ＭＯ原子沉积使灯丝寿命延长一倍，达到了４０小时。
This article briefly describes the characteristics of the Freeman ion source used in the ion beam material modifier. The main parameters are the filament current, pressure drop, magnetic field, gas flow, and the relationship between the electrode voltage and the extracted ion beam current. Due to the leakage of cooling water (the degree of vacuum decreased from 3.9 × 10-4 to 4.2 × 10-4Pa) inside the source body, the gas molecules are ionized, the arcing is difficult and the plasma instability is made. And the arc between the boron nitride chamber must be deposited on the sputtered W, Mo atoms lead to decreased insulation, shorten the life of the filament partial structural improvements. The results show that it is very important to improve the processing technology, ensure the sealing performance of the vacuum system and the purity of the input gas to the molecular ionization and plasma stabilization in the arc chamber. Place the molybdenum shield on the BN insulator to effectively shield the W and MO atoms Deposition double the filament life, reaching 40 hours.