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在高分子基板上制作成的单膜全氟高分子波导结构,具有非热敏感性、偏振无关的工作特点,同时,在1310nm、1550nm工作波长分别有<0.04和<0.05dB/cm的超低光损耗.本文研究了在器件制作过程中所产生的孔状结构对传输损耗的直接影响.实验证明,超低的传输损耗可以通过降低孔状结构的尺度至纳米范围来实现.这些波导结构可以成为新一代高性能集成高分子光子器件的技术平台.
The single-film perfluoropolymer waveguide structure fabricated on a polymer substrate has the characteristics of non-heat-sensitivity and polarization-independent operation. Meanwhile, the operating wavelengths of 1310 nm and 1550 nm are respectively <0.04 and <0.05 dB / cm, Optical loss.In this paper, we study the direct effect of the hole-shape structure on the transmission loss produced in the device fabrication process.Experiments show that the ultra-low transmission loss can be achieved by reducing the size of the hole structure to the nanometer range.These waveguide structures can Become a new generation of high-performance integrated polymer photonic devices technology platform.