一、传感器的发展近年来,由于半导体技术已进入超大规模集成化阶段,各种工艺和材料性能的研究已达到相当高的水平,为传感器的发展创造了有利的条件。目前传感技术无论深度和广度方面均有新的进展,大体可归纳如下: First, the sensor development In recent years, due to semiconductor technology has entered the stage of very large-scale integration, a variety of processes and material properties of the research has reached a very high level, creating favorable conditions for the development of the sensor. The current sensing technology, both in depth and breadth have new progress, generally can be summarized as follows: