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利用反应性射频磁控溅射在Ｓｔ（１００）单晶衬底上沉积氯化碳薄膜，并系统地研究了薄膜的结构、成分及化学健等信息．Ｘ射线衍射分析表明，制备的氯化碳薄膜具有非晶结构红外吸收话说明薄膜中碳、及原子结合成化学键，其中包括碳、氮单键在红外谱中还发现了多光束干涉现象，计算的结果与扫描电子显微镜对薄膜表面和截面形貌的分析结果相符，并由此推算出薄膜的折射率ｎｒｅｌ．９．Ｘ射线光电子能谱分析证实了碳原子与氮原子间存在单键，并得出薄膜中Ｘ、碳的原子比
The films were deposited on a St (100) single crystal substrate by reactive RF magnetron sputtering. The structure, composition and chemical properties of the films were studied systematically. X-ray diffraction analysis shows that the prepared carbon chloride film has an amorphous structure. Infrared absorption words indicate that the carbon in the film and atoms are combined into chemical bonds. The single-bond of carbon and nitrogen also finds the phenomenon of multi-beam interference in the infrared spectrum. The results are in good agreement with the results of scanning electron microscopy (SEM) on the surface and cross-sectional morphology of the film, and the refractive index nrel of the film is deduced therefrom. 9. X-ray photoelectron spectroscopy confirmed the existence of a single bond between the carbon atom and the nitrogen atom, and obtained X, carbon atoms in the film atomic ratio