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使用射频磁控溅射法在石英衬底上制备quartz/ZnO/TiNi及quartz/TiNi/ZnO复合薄膜结构,利用XRD、SEM划痕仪等测试方法研究了复合薄膜的相结构、微观组织、力学性能。利用DMA分别研究了quartz/TiNi与quartz/ZnO/TiNi复合结构的阻尼性能随振动频率及振幅的变化规律。结果表明,前者频率响应范围在10Hz以内,后者响应范围达到20Hz;前者的临界外加激振电压仅为0.6V,后者的临界外加激振电压达到1.0V。阻尼性能测试表明,quartz/ZnO/TiNi复合结构的阻尼性能优于quartz/TiNi复合结构。由划痕仪测得两种复合薄膜结构与基体的临界结合力分别为45.75和40.15N。
The structure of quartz / ZnO / TiNi and quartz / TiNi / ZnO composite films were prepared on a quartz substrate by RF magnetron sputtering. The phase structure, microstructure and mechanical properties of the composite films were investigated by XRD and SEM. performance. The damping properties of quartz / TiNi and quartz / ZnO / TiNi composite structures were studied by using DMA, respectively, with the variation of vibration frequency and amplitude. The results show that the former has a frequency response within 10Hz and the latter has a response range of 20Hz. The former imposes a critical impulse voltage of only 0.6V and the latter imposes a critical impulse voltage of 1.0V. The damping performance test shows that the damping performance of quartz / ZnO / TiNi composite structure is better than quartz / TiNi composite structure. By the scratch tester measured the critical bonding strength of the two composite film structure and the matrix were 45.75 and 40.15N.