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光学计量投影仪轮廓测量精度除了与测量工具的准确性和人眼的瞄准误差有关外,主要依赖于物镜放大倍率的准确性。而放大倍率的准确性又依赖于校正工具的准确性和人眼的瞄准误差,不过主要还是取决于物镜的光学畸变误差。畸变随视场变化的非线性性质使放大倍率的一致性遭到破坏,造成了投影屏上各部位测量精度的不一致。在具有一定性能参数的物镜中,畸变误差是不可避免的,问题是如何将它控制在仪器精度
Optical metrology projector profile measurement accuracy in addition to measuring the accuracy of the tool and the human eye aiming error, mainly depends on the accuracy of the objective magnification. The accuracy of the magnification depends on the accuracy of the calibration tool and the human eye’s aiming error, but mainly depends on the objective optical distortion error. The non-linear nature of distortion as a function of field changes the consistency of the magnification being compromised, resulting in inconsistencies in the measurement accuracy of the various parts of the projection screen. In the objective lens with a certain performance parameter, the distortion error is inevitable, the question is how to control it in the instrument precision