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提出了一种正交偏振干涉仪中光学元件位置固定与性能检测的方法,用于亚纳米级测量分辨力激光干涉仪的光路系统集成及其性能评价。构建了光学干涉仪在线检测与评价系统,基于强度检测方案,实时地对干涉仪输出的四路偏振光信号强度、干涉条纹可见度以及各路干涉信号之间的正交状态进行检测,并完成了小尺寸正交偏振激光干涉仪的光路集成;分别对分立式与集成式干涉仪的稳定性和微弱振动信号测量进行了对比实验。实验表明,集成式激光干涉仪的测量分辨力可达10 pm/Hz～(1/2),信噪比优于分立干涉仪10 dB,稳定性明显提高。
A method of position fixing and performance testing of optical components in orthogonal polarization interferometer is proposed for the optical system integration and performance evaluation of sub-nanometer measurement resolution laser interferometer. Based on the intensity detection scheme, the real-time detection of the four-polarization signal intensity, the interference fringe visibility and the orthogonal state between the interferometer signals output by the interferometer is completed. Small size Orthogonal polarization laser interferometer optical path integration; respectively discrete and integrated interferometer stability and weak vibration signal measurements were compared experiment. Experiments show that the integrated laser interferometer has a resolution of 10 pm / Hz ~ (1/2), and the signal to noise ratio is better than that of the discrete interferometer of 10 dB. The stability is obviously improved.