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本文介绍双(?)PR OM 的关键工艺—熔断丝工艺及其在实际中的应用.研究了NiCr 熔丝的淀积条件、退火特性、与标准STTL 工艺的相容性以及熔丝的编程特性。在此基础上研制了256位双极PROM LT3288,其各项性能指标均达到了设计与使用的要求.
This paper introduces the key process of dual PRIM, fuse process and its application in practice.The deposition conditions, annealing characteristics, compatibility with standard STTL process and the programming characteristics of fuses . On this basis, a 256-bit bipolar PROM LT3288 has been developed, and its performance indicators have reached the design and use requirements.