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介绍了基于频闪显微干涉技术的MEMS动态测试系统的测量原理,设计了数据分析处理算法。采用基于立方插值的亚像素模板匹配技术实现了1/50像素的面内位移测量精度。利用分割线去包裹算法实现了从干涉图到三维形貌图的重构。
The measurement principle of MEMS dynamic test system based on stroboscopic microscopic interference technique is introduced and the algorithm of data analysis and processing is designed. The accuracy of in-plane displacement measurement of 1/50 pixel is achieved by using the sub-pixel template matching technology based on cubic interpolation. The reconstruction of the three-dimensional topography from the interferogram to the three-dimensional topography is achieved by using the dividing line wrapping algorithm.