在转速控厚法的基础上 ,排除了射频溅射的电磁干扰 ,实现了自动转速控厚法。用这种方法镀制超薄多层膜时 ,可以实时记录下镀制每层膜的沉积时间、自动切换转速、完成设定周期后自动停止转动。自动转速控厚法与转速控厚法相比 ,明显降低了多层膜制备的劳动强度 ,提高了多层膜制备的成品率和监控精度。而且将在镀制复杂膜系多层膜时 ,具有更加明显的优势 On the basis of speed control method, electromagnetic interference of RF sputtering is excluded, and automatic speed control method is realized. When plating ultra-thin multi-layer film in this way, the deposition time of each layer can be recorded in real time, and the rotation speed can be automatically switched to stop automatically after completing the set period. Compared with the speed control method, the automatic speed control method significantly reduces the labor intensity of multi-layer film preparation and improves the yield and monitoring accuracy of multi-layer film preparation. And will be more complex when the coating system of multi-layer film, the more obvious advantages