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简要介绍了利用LIGA技术中同步辐射光刻、微电铸技术制作α粒子编码成像波带片的研究,讨论了编码波带片的结构和影响波带片的平面和层析分辨率的参数。根据实验要求设计和研制了一种α粒子编码成像波带片。
This paper briefly introduces the research on the fabrication of alpha particle coded imaging zone plate by synchrotron radiation lithography and micro-electroforming technology in LIGA. The structure of the encoding zone plate and the parameters affecting the plane and tomographic resolution of the zone plate are discussed. According to the experimental requirements, an α particle coded imaging zone plate was designed and developed.