1987年,随着人类对微观世界的操控能力越发深入,肉眼无法分辨的微电机出现了。美国加州大学伯克利分校做出了世界上第一个静电驱动的微电机,这台电机的直径与头发丝相当,却可以每分钟转动1.7万转,这便是MEMS技术的开端。这类系统的优势是极小、极轻、不易被发觉,并且也因为这样的特点,使这类系统具有优异的力学性能,特别是抗冲击能力。由于MEMS上最敏感的部分可能只有几毫克的质量,因此即使以光速与其他物体 In 1987, with the deepening of mankind's ability to manipulate the micro-world, the micromotor that can not be distinguished with the naked eye appeared. University of California, Berkeley made the world's first electrostatically driven micro-motor, the diameter of the motor and hair wire quite, but it can rotate 17,000 revolutions per minute, which is the beginning of MEMS technology. The advantages of such systems are extremely small, extremely light and not easily detectable, and because of this characteristic, these systems have excellent mechanical properties, especially impact resistance. Since the most sensitive part of the MEMS may only be a few milligrams of quality, so even at the speed of light with other objects