论文部分内容阅读
着重讨论了影响RF激光CO2波导激光器高效运转的几个因素,指出要提高RF功率的高效转换,必须获得均匀稳定的放电,其中阻抗匹配技术、RF源频率、气体混合比等起着重要作用。
Several factors that affect the efficient operation of RF laser CO2 waveguide laser are emphatically discussed. It is pointed out that in order to improve the efficient conversion of RF power, uniform and stable discharge must be obtained. Impedance matching technology, RF source frequency and gas mixture ratio play an important role.