钨在SF_6/O_2射频等离子中的反应离子刻蚀动力学研究=AkineticstudyofreactiveionetchingoftungsteninSF_6/O_2RFplasmas[刊,英]/Peignom,M.C.…//J.Electrochem...
Kinetics of Reactive Ion Etching of Tungsten in SF_6 / O_2 RF Plasma = Akinetic study of reactive gold in SF_
RTA处理时Si中B离子注入的扩散模拟:B增强扩散时扩散缺陷形成与退火的关系=Diffusionmodelingofionimplantedboroninsili-conduringRTA:correlationofextendeddefectfor...
Diffusion simulation of diffusion of B ions into Si during RTA treatment: Diffusion mode deioni