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本文介绍了在半导体激光光纤和位相板相结合的准直情况下,利用CCD探测器测量大尺寸形位误差的原理,并针对位相板衍射图像的特点,提出了一种处理此类衍射图样的图像处理新方法——投影法。同在时间上采用的多次平均的方法相比较,投影法相当于采用了空间上的平均,消除了CCD表面保护玻璃形成的干涉条纹的影响,对空气扰动也起到了很好的抑制作用。并且使二维图像处理变为一维计算,大大提高了计算速度
In this paper, the principle of measuring the large form-fitting errors by using the CCD detector under the condition of the alignment of the semiconductor laser fiber and the phase plate is introduced. Aiming at the characteristics of the diffraction plate of the phase plate, a method of processing such diffraction patterns New method of image processing - projection method. Compared with the multiple mean method used in time, the projection method is equivalent to using spatial averaging, eliminating the influence of interference fringes formed by the surface protective glass of CCD, and also playing a very good role in suppressing air disturbance. And make two-dimensional image processing into one-dimensional calculation, greatly improving the speed of calculation