微缺陷,又有人称为旋涡缺陷,主要是指蚀坑呈旋涡分布的微缺陷。现已知道,旋涡缺陷只不过是微缺陷的一种。呈旋涡分布的缺陷并非都是微缺陷,如杂质条纹,经850℃以上氧化直拉单晶择优腐蚀后观察到的“氧旋涡”,富碳区熔单晶中更特殊“旋涡”,它只在高温磷扩散后才能观察到,这三种都不是微缺陷。许多不呈旋涡分布的则是微缺,如生长微缺陷中的C、D,许多热诱生微缺 Micro-defects, also known as vortex defects, mainly refers to the corrosion pit micro-defects were vortex distribution. It is now known that a vortex defect is only a type of micro-defect. Vortex-distributed defects are not all microdefects, such as impurity fringes, “vortex vortexes” observed after selective oxidation of a single crystal of Czochralski (Czochralski) at 850 ° C, and more particularly “vortices” in the carbon-rich molten single crystal After high-temperature phosphorus diffusion can be observed, these three are not micro-defects. Many are not swirling distribution of wilts, such as the growth of micro-defects C, D, many heat-induced micro-missing