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纳米级金属薄膜能够作为热释电探测器红外吸收薄膜在14~16μm波段范围内有效应用已经得到证明.通过调节沉积在LT(钽酸锂)晶体材料上的纳米级镍铬(NiCr)薄膜的厚度和表面特征来改善纳米金属薄膜红外吸收特性.通过调节晶体材料的厚度,改变抗反射腔的深度,从而调节吸收波长.为进一步加强红外吸收,应用化学腐蚀,生成粗糙的纳米级薄膜表面结构,从而极大程度上增加吸收表面积.通过将这两种方法结合,可以明显增强指定波段的红外吸收,且其制造过程完全兼容,易于实现.可控的吸收性能的实验结果与仿真和设计情况相符合.
It has been demonstrated that the nano-scale metal thin film can be effectively used as a pyroelectric detector infrared absorbing film in the wavelength range of 14 to 16 μm. By adjusting the thickness of the nano-sized nickel chromium (NiCr) thin film deposited on the LT (lithium tantalate) Thickness and surface features to improve the infrared absorption characteristics of nano-metal film by adjusting the thickness of the crystal material, changing the depth of the anti-reflection cavity to adjust the absorption wavelength.In order to further strengthen the infrared absorption, chemical etching, the formation of rough nano-scale film surface structure , Thus greatly increasing the absorption surface area.By combining these two methods can significantly enhance the infrared absorption of the specified band, and its manufacturing process is fully compatible and easy to implement.Controllable absorption performance of the experimental results and simulation and design of the situation Match.