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设计并制备了一种基于负电晕放电原理及微机电系统(MEMS)技术的多针-板型气体传感器。研究了电极间距对传感器放电特性的影响,综合考虑起晕电压、信号输出范围及稳定放电范围,优化电极间距为120μm。测试了传感器在体积分数均为6×10~(-4)的乙酸、异丙醇、乙醇和丙酮四种有机气体中的放电特性,传感器对乙酸气体响应最灵敏。测试了传感器在-0.91 kV放电电压下对乙酸气体的敏感特性。结果表明,该传感器对不同体积分数的乙酸气体的响应具有较好的线性关系,对体积分数为10~(-6)的乙酸气体的响应约为0.61 mV,理论检测限(三倍噪声)约为1.2×10~(-5)。传感器对乙酸气体响应灵敏度高、重复性好。
A multi-pin-plate type gas sensor based on the principle of negative corona discharge and micro-electromechanical system (MEMS) was designed and prepared. The influence of the electrode spacing on the discharge characteristics of the sensor was studied. Taking into account the corona onset voltage, the signal output range and the stable discharge range, the optimized electrode spacing was 120μm. The discharge characteristics of the sensor in four kinds of organic gases (acetic acid, isopropanol, ethanol and acetone) with the volume fraction of 6 × 10 ~ (-4) were tested. The sensor was the most sensitive to acetic acid gas. The sensitivities of the sensor to acetic acid gas at -0.91 kV discharge voltage were tested. The results show that the sensor has a good linear relationship with the response of acetic acid gas with different volume fraction, and the response to acetic acid gas with volume fraction of 10 ~ (-6) is about 0.61 mV. The theoretical detection limit (triple noise) Is 1.2 × 10 ~ (-5). The sensor has high sensitivity to acetic acid gas and good repeatability.