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围绕未来固态大功率激光系统中低阶像差补偿的需求,开展了边缘驱动变形反射镜的优化设计和仿真分析。提出了4臂边缘驱动变形镜设计结构,并建立了仿真模型,以变形镜拟合残差面形的均方根(RMS)值和峰-谷(PV)值为目标,分析了不同结构参数对变形镜校正低阶像差能力的影响。根据对离焦、像散和彗差校正拟合残差面形的RMS值和PV值随结构参数变化的曲线,确定了变形镜的最佳设计参数并给出了该参数下拟合离焦、像散和彗差的残差面形RMS值和PV值。对于PV值分别为20、10、10μm的离焦、像散和彗差,拟合残差面形RMS值和PV值分别为0.2366μm和1.3762μm、0.0112μm和0.1146μm以及0.1606μm和0.9773μm。以上结果表明,设计的4臂边缘驱动变形镜的校正效果符合设计要求。
Focusing on the demand of low-order aberration compensation in the future solid-state high-power laser system, the optimal design and simulation analysis of the edge-driven deformable mirror are carried out. A 4-arm edge-actuated deformable mirror design structure was proposed and a simulation model was established. With the aim of fitting the root mean square (RMS) and peak-valley (PV) values of the residual surface shape by the deformable mirror, different structural parameters Effect of Deformed Mirror on Correcting Low Order Aberration Ability. According to the curves of the RMS value and the PV value of the residual surface shape of the defocus, astigmatism and coma correction fitting structure parameters, the optimal design parameters of the deformable mirror are determined and the parameters of the fitting defocus , Astigmatic and coma residual shape RMS and PV values. For defocus, astigmatism and coma with PV values of 20, 10 and 10μm respectively, the RMS and PV of the fitted surface were 0.2366μm and 1.3762μm, 0.0112μm and 0.1146μm and 0.1606μm and 0.9773μm, respectively . The above results show that the designed 4-arm edge-actuated deformable mirror has the correction effect in line with the design requirements.