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本文采用三氟乙酸盐-金属有机沉积(TFA-MOD)技术在LaAlO3(00l)单晶基片上、在不同的低温热处理条件下制备出不同形貌的前驱膜.从金相显微镜(OM)和扫描电镜(SEM)观察可以看出,低温预分解时造成前驱膜的形貌不完整性在高温处理后并没有消除.对高温热处理后的YBCO成相膜用X射线衍射进行了物相定性分析,用Jc-Scan Leipzig系统对超导薄膜进行了超导性能分析.结果表明,前驱膜的形貌不完整性造成高温成相阶段样品杂相出现和超导性能降低.经过对低温热处理条件的优化,得到表面形貌完整的前驱膜,避免了高温成相阶段杂相出现,提高了涂层导体的超导性能,Jc可以超过1.5MA/cm2.
In this paper, different morphologies of precursor films were prepared on the LaAlO3 (00l) single crystal substrate by TFA-MOD under different conditions of low temperature heat treatment. SEM and SEM results showed that the morphology of precursor film was not resolved after low temperature pre-decomposition, but the phase morphology of YBCO film did not disappear after high temperature treatment.The phase characterization of YBCO film after high temperature heat treatment was characterized by X-ray diffraction The superconducting properties of the superconducting thin films were analyzed by the Jc-Scan Leipzig system.The results showed that the heterogeneity of the precursors resulted in the decrease of the heterogeneity and superconductivity of the superconducting phases during the high temperature phase transformation.After the low temperature heat treatment conditions , The precursor film with complete surface topography is obtained, which avoids the appearance of heterogeneous phase at high temperature and increases the superconductivity of the coated conductor. The Jc can exceed 1.5MA / cm2.