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In order to study the magnetic properties and structure of very thin permalloy films, Ni_(81)Fe_(19) films of 12nm in thicknesswere prepared by different instruments at an ultrahigh base vacuum and a lower base vacuum. The anisotropic magnetoresistance co-efficients (ΔR/R) of Ni_(81)Fe_(19) (12nm) films reached 1.6% and 0.6%, and the coercivities were 127 and 334 A/m, respectively. X-rayphotoelectron spectroscopy (XPS) and X-ray diffraction (XRD) were used to study the structure and surface chemical state. The ex-perimental results show that the films prepared at the ultrahigh base vacuum have a smoother surface, a bigger grain size and adenser structure with fewer defects than those prepared at the lower base vacuum.
In order to study the magnetic properties and structure of very thin permalloy films, Ni 81 (81) Fe 19 films of 12 nm in thickness prepared by different instruments at an ultrahigh base vacuum and a lower base vacuum. The anisotropic magnetoresistance co-efficients ΔR / R) of Ni_ (81) Fe_ (19) (12nm) films reached 1.6% and 0.6% respectively, and the coercivities were 127 and 334 A / m, respectively. X-rayphotoelectron spectroscopy (XPS) and X-ray diffraction XRD) were used to study the structure and surface chemical state. The ex-perimental results show that the films prepared at the ultrahigh base vacuum have a smoother surface, a bigger grain size and adenser structure with fewer defects than those prepared at the lower base vacuum.