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采用一种以五次幂函数为基础所设计的1×4光波导功分器路径,利用中心波长为800nm、重复频率为75MHz的飞秒脉冲激光为光源,通过控制三位电动平移台,在Z切割铌酸锂晶体进行横向扫描此路径,在激光功率为270mW和扫描速度为0.05mm/s下,制备出1×4光波导功分器,分析了改变扫描速度和扫描次数对波导形成的影响,以及波导形成的原因.实验结果表明:在强激光的各种参量一定时,扫描速度越小,扫描次数越多,波导线宽越大,扫描速度在一定范围内时,波导损耗较低.
A 1 × 4 optical waveguide splitter designed on the basis of the fifth power function is adopted. By using a femtosecond pulsed laser with a center wavelength of 800 nm and a repetition frequency of 75 MHz as a light source, by controlling a three-position electric translation stage, Z-cut lithium niobate crystals were scanned transversely to this path. At a laser power of 270 mW and a scanning speed of 0.05 mm / s, a 1 × 4 optical waveguide splitter was fabricated. The effects of changing the scanning speed and scanning times on the waveguide formation Influence and waveguide formation.The experimental results show that when the parameters of a strong laser are constant, the scanning speed is smaller, the number of scanning is more, the larger the waveguide line width is, and the waveguide loss is lower when the scanning speed is within a certain range .