用卢瑟福背散射技术测定了Ｎｉ５０ｗｔ％Ｔｉ合金在３０ｋｅＶＡｒ＋离子轰击时的组分原子（Ｎｉ和Ｔｉ）溅射角分布．结果表明，Ｎｉ原子和Ｔｉ原子的角分布存在差别：Ｎｉ原子在靶表面法线方向（发射角θ＝０°附近）择优发射，而Ｔｉ原子则在大发射角区域（θ＞４５°）发射较Ｎｉ强．根据元素在靶点表面按形貌特征局域富集情况的观测，对实验结果进行了讨论 The sputter angle distribution of Ni, Ti and Ni atoms in Ni50wt% Ti alloy during bombardment with 30keVAr + ion was measured by Rutherford backscattering technique. The results show that there is a difference in the angular distribution of Ni atoms and Ti atoms: Ni atoms emit preferentially in the normal direction of the target surface (emission angle θ = 0 °) and Ti atoms emit in the large emission angle region (θ> 45 °) Stronger than Ni. The experimental results are discussed based on the observations that the elements are localized on the target surface according to the topographic features