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介绍了正在现场使用的亚微米电子束曝光机激光工件台系统，详细论述了它的技术特征，分析了影响重复测量精度的误差因素，给出了系统各部分实际检测达到的技术指标。
The laser workpiece stage system of submicron electron beam exposure machine is introduced in the field. The technical characteristics of the laser workpiece stage are discussed in detail. The error factors affecting the accuracy of the repeated measurement are analyzed. The technical indexes of each part of the system are obtained.