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为改善石英器件与产品的性能以适应并推动微/纳机电系统技术的发展,从理论和实验两方面系统地研究了多次压电效应对压电石英弹性系数、压电系数和机电耦合系数等物性系数的影响.理论分析表明,外应力作用下多次压电效应对压电石英弹性系数及压电系数的影响分别是多次逆和多次正压电效应综合作用的体现.采用与压电石英晶体并联一个远大于其等效电容量的电容器的实验方法,测试了多次压电效应对石英物性系数的影响,获得了三次压电效应时石英的压电系数为0.04 pC/N,比未考虑多次压电效应时提高了1.75%,所对应的机电耦合系数亦增加了1.75%.
In order to improve the performance of quartz devices and products to adapt to and promote the development of micro / nano mechanical and electrical system technology, the effects of multiple piezoelectric effects on piezoelectric quartz elastic coefficient, piezoelectric coefficient and electromechanical coupling coefficient have been studied theoretically and experimentally. Etc. The theoretical analysis shows that the influence of multiple piezoelectric effects on the elastic coefficient and the piezoelectric coefficient of piezoelectric quartz is the combination of multiple inverse and multiple positive piezoelectric effects, Piezoelectric quartz crystal in parallel with a much larger than its equivalent capacitance of the capacitor test method to test the effect of multiple piezoelectric effects on the physical properties of quartz to obtain the third piezoelectric effect of quartz piezoelectric coefficient of 0.04 pC / N , 1.75% higher than that without considering the multiple piezoelectric effect, and the corresponding electromechanical coupling coefficient also increased by 1.75%.