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介绍了一种基于以太网控制的微焦点X射线源装置。整个装置主要由微焦点管头、高压发生器、管头控制子系统装置及计算机等部分构成。其中管头控制子系统装置通过两块电路系统实现其整体功能,分别称为管头控制电路和管头接口电路。高压CPU板内嵌到高压发生器中。计算机通过路由器分别连接到高压CPU板和管头控制电路。高压CPU板对微焦点射线管内的灯丝电流、栅压以及管电压进行控制。管头控制电路一方面使打在阳极靶上的电子束进行聚焦,另一方面控制涡轮泵、隔膜泵和电磁阀。相较于传统X射线机,本系统具有高达2μm~5μm的检测精度,同时具备网络化控制、可操作性与集成度高,可连续工作等优点。
A micro-focus X-ray source device based on Ethernet control is introduced. The whole device is mainly composed of microfocus tube head, high voltage generator, tube head control subsystem device and computer. Among them, the pipe head control subsystem device realizes its overall function through two circuit systems, which are respectively called a pipe head control circuit and a pipe head interface circuit. High-pressure CPU board embedded into the high voltage generator. Computer through the router were connected to the high-pressure CPU board and header control circuit. The high-pressure CPU board controls the filament current, grid voltage and tube voltage in the microfocus tube. The tube head control circuit focuses the electron beam striking the anode target on the one hand and the turbo pump, diaphragm pump and solenoid valve on the other hand. Compared with the traditional X-ray machine, the system has a detection accuracy of up to 2μm ~ 5μm, at the same time with networked control, operability and integration, can work continuously and so on.