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在光栅计量技术中,裂相光栅的一个重要特点,是其对标尺光栅与指标光栅之间的平面转角误差不敏感。本文从理论上对此转角误差的容限作出定量分析,从而为光栅导向机构的设计提供必要的依据。
In grating measurement technology, an important characteristic of split phase grating is its insensitivity to plane angle error between scale grating and index grating. This paper quantitatively analyzes the tolerance of this corner error in theory, which provides the necessary basis for the design of grating guide mechanism.