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光瞳滤波器是一种重要的调控焦点处光强分布的器件。借助光的标量衍射理论,研究了不同的入射光场分布对超分辨光瞳滤波器的超分辨性能和焦深的影响。研究结果表明:在入射总光能相同的情况下,光场以高斯函数分布入射时,与均匀光入射相比,其超分辨性能和焦深扩展特性变化很小。当光场以零阶贝塞尔函数分布入射时,光斑压缩比基本不变,斯特雷尔比有所下降,焦深有一定扩展。当光场以一阶贝塞尔函数分布入射时,光斑压缩比有所减小,斯特雷尔比有较大提高,焦深有所减小。总之,在相同情况下,光束的光强分布越靠近边缘,越有利于实现超分辨,斯特雷尔比和焦深两个量中其中一个的增大以另一个的减小为代价。
Pupil filter is an important device to adjust the intensity distribution of the focus. Based on the scalar diffraction theory of light, the influence of different incident light field distribution on the super-resolution performance and focal depth of super-resolution pupil filter is studied. The results show that when the total incident light energy is the same, the super-resolution and depth-of-focus propagation characteristics of the light field change little when compared with the uniform light incident when the light field is incident on the Gaussian distribution. When the light field is distributed with the zeroth order Bessel function, the spot compression ratio is basically the same, the Stray’s ratio is decreased, and the depth of focus is somewhat expanded. When the light field is distributed with the first-order Bessel function, the spot compression ratio is reduced, the Stray’s ratio is greatly increased, and the depth of focus is reduced. In short, under the same conditions, the closer the light intensity distribution of the light beam is to the edge, the more it is possible to achieve super-resolution. The increase of one of the Strehl ratio and the focal depth is at the expense of the other.