用6MeV F离子束辐照了淀积在Si单晶基底上的Sb、Ag、Cu、Pd和Ni金属薄膜,并用胶带法对不同辐照剂量的各点进行了增强附着阈剂量的测量。结果表明,金属薄膜增强附着阈剂量的大小可能和膜材料的弹性模量有关。弹性模量大的金属薄膜对应的增强附着的阈剂量也大。对这一现象,应用离子束轰击前后薄膜内部应力改变的观点给予了定性解释。 The thin films of Sb, Ag, Cu, Pd and Ni deposited on a Si monocrystal substrate were irradiated with a 6 MeV F ion beam and the adhesion enhancement threshold dose was measured at each of the different irradiation doses using a tape method. The results show that the size of metal thin film to enhance adhesion threshold may be related to the elastic modulus of the membrane material. The threshold dose for enhanced adhesion corresponding to a metal film with a large elastic modulus is also large. To this phenomenon, the application of ion beam bombardment before and after stress changes within the film gives a qualitative explanation.