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为实现微型化、抗电磁干扰、可长时间工作和可远距离传输的加速度传感器,提出了一种基于微机电系统(MEMS)非对称扭镜结构的光纤加速度计设计方案,并利用对角度变化非常敏感的双光纤准直器对扭镜的扭转角度变化进行检测。MEMS光纤加速度计由MEMS非对称扭镜结构、驱动电极和双光纤准直器等组成。分析了器件的加速度敏感原理和光纤检测原理,介绍了器件综合设计考虑,并给出了器件的结构参数。利用MEMS加工技术成功制作了MEMS光纤加速度计样品。对加速度计进行了实验测试,加速度计的输出实验值与理论值吻合。测试结果表明,该加速度计量程为±2g,带宽为600 Hz,分辨率优于10-4 g,且具有良好的线性度和重复性。该MEMS光纤加速度计将MEMS敏感结构与光纤检测相结合,兼备了两者的优点,结构紧凑、制作工艺简单。
In order to realize the miniaturization, anti-electromagnetic interference, acceleration sensor which can work for a long time and can be transmitted over long distances, a design scheme of optical fiber accelerometer based on MEMS asymmetric torsional mirror structure is proposed. Very sensitive dual-fiber collimators detect the change in twist angle of the twisted pair. MEMS optical fiber accelerometer MEMS asymmetric torsional mirror structure, the drive electrode and dual-fiber collimator and other components. The accelerometer sensitivity principle and optical fiber detection principle of the device are analyzed. The integrated design considerations of the device are introduced, and the structural parameters of the device are given. MEMS fiber optic accelerometer samples were successfully fabricated using MEMS technology. The accelerometer was tested experimentally, the output of the accelerometer experimental value is consistent with the theoretical value. The test results show that the accelerometer has a measurement range of ± 2g, a bandwidth of 600 Hz, and a resolution of better than 10-4 g, and has good linearity and repeatability. The MEMS optical fiber accelerometer combines the MEMS sensitive structure with the optical fiber detection and combines the advantages of both. The structure is compact and the manufacturing process is simple.