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对C+注入α-Al2O3单晶样品的表面残余应力、显微硬度、断裂韧性和注入层破坏临界负荷等力学性能的变化进行了研究.结果表明:C+离子注入Al2O3单晶时,表面层的破碎临界负荷增大.在1×1017C+/cm2时表面产生的残余压缩应力达到最大,而更高剂量的注入使表面层产生非晶化,降低了表面的残余压缩应力.在5×1017C+/cm2注入剂量时,由于表面残余压缩应力和表面非晶化的协同效应使注入层具有较高的表面韧性和表面层耐破碎临界负荷.
The changes of mechanical properties such as residual stress, microhardness, fracture toughness and critical load of implanted layer of α-Al2O3 single crystal samples injected into C + + were studied. The results show that when C + ions are implanted into the Al2O3 single crystal, the critical load of the surface layer is increased. At 1 × 10 17 C + / cm 2, the residual compressive stress on the surface is maximized, while the higher dose on the surface causes amorphization of the surface layer, reducing the residual compressive stress on the surface. At a dose of 5 × 10 17 C + / cm 2, the implanted layer has higher surface toughness and critical resistance to breakage of the surface layer due to the synergistic effect of surface residual compressive stress and surface amorphization.