一、引言集成光学技术的一个重要任务是制作集成光路器件,这种器件是一个小型化和集成化的光学系统,它所使用的分立元件也是微型的,因此,制作集成光路和微型元件所使用的材料和工艺方法都有其特殊要求。一般地说,使用的材料要导光性能好,适合于连接集成,能在制作工艺上作出小型化的光学系统。工艺方法上基本上是原子和分子水平上的加工,抛弃了光学加工中的切、拋、磨等机械方法,形成了一套新的制作技术。在集成光学技术原理提出的初期,人们设计了许多制作集成光路的方案,提出了许多美 I. INTRODUCTION One of the important tasks of integrated optical technology is to produce an integrated optical device. This device is a miniaturized and integrated optical system. The discrete components used are also miniature. Therefore, it is necessary to make integrated optical paths and micro-components The materials and processes have their own special requirements. In general, the materials used should have good light guiding properties and be suitable for connection integration and miniaturization of the optical system in the manufacturing process. Process is basically atomic and molecular level of processing, abandoned the optical processing of cutting, polishing, grinding and other mechanical methods, forming a new production technology. In the early days of the principle of integrated optical technology, many people made a lot of programs to make integrated optical paths and proposed many beautiful