论文部分内容阅读
提出了一种新的电容式压力传感器,传感器结构为由Al/SiO2/n-typeSi等三层方形膜构成的固态电容.传感器采用pn结自停止腐蚀和粘结剂键合的方式制造,制造过程仅需三块掩模板.对不同边长传感器进行测试,在410～1010hPa的动态范围,边长为1000,1200和1400μm的压力传感器,相应灵敏度分别为1.8,2.3和3.6fF/hPa.边长为1500μm的传感器,其灵敏度为4.6fF/hPa,全程非线性度为6.4%,最大滞回误差为3.6%.分析结果表明介电常数变化是引起电容变化的主要原因.
A new capacitive pressure sensor is proposed and the sensor structure is a solid capacitor consisting of three layers of square film such as Al / SiO2 / n-typeSi.The sensor is manufactured by pn junction self-stop corrosion and adhesive bonding The process requires only three masks.On the side of the sensor for testing, in 410 ~ 1010hPa dynamic range, the side length of 1000,1200 and 1400μm pressure sensor, the corresponding sensitivity of 1.8, 2.3 and 3.6fF / hPa. The sensitivity of the sensor with the length of 1500μm is 4.6fF / hPa, the full nonlinearity is 6.4% and the maximum hysteretic error is 3.6%. The analysis shows that the change of dielectric constant is the main reason for the change of capacitance.