前言这几年俄歇电子能谱装置的普及是惊人的,即使在国内也有超过一百个装置正被应用于许多不同领域。它多数和半导体器件、钢铁材料有关,可是最近在生产线路的质量管理方面也使用起来了。俄歇电子能谱装置这样地普及,有一些重要原因。若将它和其它分析法相比较而作简单的说明,则可举出下面几点。(1)是非破坏的分析方法;(2)可以得到固体表面下80以内的情报;(3)可以分析除H,He以外 Preface The popularity of Auger electron spectroscopy devices has been phenomenal in recent years, with more than a hundred devices being used domestically in many different areas. It is mostly related to semiconductor devices and steel materials, but it has also recently been used in the quality management of production lines. There are some important reasons why Auger electron spectroscopy devices are popularized in this way. If it is simply compared with other analysis methods, the following points can be cited. (1) is a non-destructive method of analysis; (2) can obtain information below the solid surface of 80; (3) can be analyzed in addition to H, He